Rapid heating equipment for semiconductor devices using innovative wireless lamp

Researchers from Tokyo University of Agriculture & Technology (TUAT), ORC Manufacturing Co. Ltd. and Techno Research., Ltd achieved high quality crystallization of amorphous silicon film by developing rapid heating technology with the microwave induced wireless heating lamp. The wireless lamp is excellent in energy saving, durability and maintainability, and it can be expected to be developed into a new heating device that is unprecedented.
Source: EurekaAlert, https://www.eurekalert.org